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  1. CMI - Center of MicroNanoTechnology

    The CMI is a complex of clean rooms and processing equipment for the training and scientific experimentation devoted to the users of microtechnologies.
    SEM3
    diffusion2
    cleanroom1
    MEMS1
    ICP1
    MEB1
    microelectronics1
    PVD1
    oxidation1
    CVD1
    wafers1
    FIB1
    sputtering1
    thin films1
    e-beam1
    photolithography1
    ebeam1
    NEMS1
    microfabrication1
    microsystem1
    nanofabrication1
    LPCVD1
    MOEMS1
    wet etch1
    dry etch1

    cmi.epfl.ch - 2009-04-10

clean room1 pharmaceutical3 mannequin2 nano2 model4 clean rooms1 glass3 icp1 micro2 mems1 dry etching1 casting3 etch1 cleanrooms1 nanotechnology2 etching2 plasma2 mode3 engrave1

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